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| Part# | Description | Make | Avail. | Price | Qty. | |
|---|---|---|---|---|---|---|
| 10-017012-002 | LAM Research 10-017012-002 LAM Research 4420 Heartbeat PCB Board 810-017012-002 Rev. 3 Working | LAM RESEARCH | Available | request quote | request quote | |
| 100997144 | LAM Research 100997144 Lam Research 4420 MKS Angle Valve 839-13521-1 Rev.D working 100997144 no valve | LAM RESEARCH | Available | request quote | request quote | |
| 11021-1-D-00332136 | LAM Research 11021-1-D-00332136 Lam 4420 11021-1-D-00332136 Loadlock Chamber 853-012-123-001-I-DFT working | LAM RESEARCH | Available | request quote | request quote | |
| 11200-3-E-00182139 | LAM Research 11200-3-E-00182139 Lam 4420 11200-3-E-00182139 Loadlock Chamber 715-130080-008 working | LAM RESEARCH | Available | request quote | request quote | |
| 11225-00 | LAM Research 11225-00 LAM 4420 Etcher Anafaze Controller 11225-00 Rev.G Working | LAM RESEARCH | Available | request quote | request quote | |
| 11230-00 | LAM Research 11230-00 Lam 4420 Anafaze 11230-00 MLS Host Communication Board 11235-50 working | LAM RESEARCH | Available | request quote | request quote | |
| 12123-1-C-01441057-R3 | LAM Research 12123-1-C-01441057-R3 Lam Drive Arm Assy. 12123-1-C-01441057 working | LAM RESEARCH | Available | request quote | request quote | |
| 12200-2-D-00302064 | LAM Research 12200-2-D-00302064 LAM Etcher Inner Gate Valve Drive 12200-2-D-00302064 Removed From 4420 Working | LAM RESEARCH | Available | request quote | request quote | |
| 12726-1-D-4991 | LAM Research 12726-1-D-4991 Lam Research 4420 12726-1-D-4991 Wafer Transport Assembly working | LAM RESEARCH | Available | request quote | request quote | |
| 13610-1-B-5149 | LAM Research 13610-1-B-5149 LAM Research 13610-1-B-5149 Solenoid Tray Assembly missing PCB LAM 4420 used | LAM RESEARCH | Available | request quote | request quote | |
| 15-024611-00 | LAM Research 15-024611-00 Lam Research Transfer Arm 15-024611-00 Rev. C Used Working | LAM RESEARCH | Available | request quote | request quote | |
| 17620-1-A-4318 | LAM Research 17620-1-A-4318 Lam 4420 Tri-Convectron Interface Assembly 17620-1-A-4318 Used Working | LAM RESEARCH | Available | request quote | request quote | |
| 2080 TCU | Lam Research 2080 TCU Lam Research 2080 TCU Temperature Control Unit 852-11098-020-B-6882 working | LAM RESEARCH | Available | request quote | request quote | |
| 2300 Exelan | Lam 2300 Exelan Etcher | Key Semiconductor Equipment | LAM RESEARCH | Available | request quote | request quote | |
| 2300 Versys | Lam 2300 Versys Etcher | Key Semiconductor Equipment | LAM RESEARCH | Available | request quote | request quote | |
| 272072-00 | LAM Research 272072-00 Lam 4420 SRAM Board 70113-003 Rev.K working | LAM RESEARCH | Available | request quote | request quote | |
| 28-8875-027 | LAM Research 28-8875-027 LAM PCB Comm. Board 28-8875-027 | LAM RESEARCH | Available | request quote | request quote | |
| 28-8875-036 | LAM Research 28-8875-036 LAM Research Opto Output PCB 28-8875-036 New | LAM RESEARCH | Available | request quote | request quote | |
| 28-8875-037 | LAM Research 28-8875-037 LAM Research Opto Input Board 28-8875-037 Rev. D New | LAM RESEARCH | Available | request quote | request quote | |
| 281339200 | Lam Research 281339200 REV 2 PCBA Distribution Motherboard | LAM RESEARCH | Available | request quote | request quote | |
| 310-170314 | LAM Research 310-170314 LAM Research LAM 9100 ADIO-A0 Control Board 310-170314 Rev. A Working | LAM RESEARCH | Available | request quote | request quote | |
| 320665100 | LAM Research 320665100 LAM Research Timing Belt 320665100 Lot of 4 New | LAM RESEARCH | Available | request quote | request quote | |
| 392A | LAM Research Printed Circuit Board | LAM RESEARCH | Available | request quote | request quote | |
| 413-054-00-2-0 | LAM Research 413-054-00-2-0 Lam Focus Ring (outer) 413-054-00-2-0 New | LAM RESEARCH | Available | request quote | request quote | |
| 4420 839-013514-001 | LAM Research 4420 839-013514-001 LAM Research 4420 839-013514-001 Weldment, Exit Load Lock Vacuum Man. working | LAM RESEARCH | Available | request quote | request quote |